Micro Process Engineering Fundamentals, Devices, Fabrication, and Applications

Book Details

  • Published: 17 April 2013
  • ISBN: 978-3-527-33500-8
  • Author: Norbert Kockmann, Oliver Brand, Gary K. Fedder, Christofer Hierold, Jan G. Korvink, Osamu Tabata
thumbnail image: Micro Process Engineering Fundamentals, Devices, Fabrication, and Applications

Purchase this Book

Now available in softcover, this practical book offers topical content from AMN, the only book series on microsystems technology, for engineers as well as MSc and PhD students on MEMS courses.


Comprehensive in its coverage, the book is divided into four sections: fundamentals, design and system integration, fabrication technologies and materials, and applications of microstructured devices and systems, with a common nomenclature throughout to aid orientation.


The result is a deeper insight leading to a more sophisticated view of continuous flow processing in education, laboratory experiments, and chemical synthesis.

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Magazine of Chemistry Europe (16 European Chemical Societies) published by Wiley-VCH