Controlled Release of Chemical Vapor Deposition Precursors

  • Author: Chemistry – A European Journal
  • Published Date: 31 May 2020
  • Source / Publisher: Chemistry – A European Journal/Wiley-VCH
  • Copyright: Wiley-VCH Verlag GmbH & Co. KGaA
thumbnail image: Controlled Release of Chemical Vapor Deposition Precursors

Related Societies

The feeding rate of the precursor compounds plays a crucial role in the chemical vapor deposition (CVD)-based synthesis of 2D materials. Conventional feeding methods usually introduce an "overdose" of precursors. Besides the waste of raw materials, this leads to the accumulation of incompletely reacted contaminants and reduces the quality of the deposition products.


Hongwei Zhu, Tsinghua University, Beijing, China, Shun Wang, Huazhong University of Science and Technology, Wuhan, China, and colleagues have developed an improved CVD feeding method based on a sustained and controlled release of the precursor. They used a polymer matrix (a nitrile butadiene rubber-modified phenolic resin, NBR-PR) to convert the highly volatile liquid precursor acetone (Ac) into a sol (NBR-PR/Ac, pictured above on the left). At room temperature, this sol retained almost 10 % of its acetone content after 30 min (determined by weight). In contrast, neat acetone completely evaporated in five minutes under the same conditions. The team designed a simple portable feeder (pictured below) to use this sol precursor in atmospheric-pressure CVD (APCVD) processes.


Using this feeder, acetone can be released in a controlled manner and used as a carbon source to grow large-area, uniform monolayer graphene films on copper substrates. According to the researchers, this feeding approach could also be useful for the efficient production of other 2D materials by extending it to other liquid or solid precursors.

 


 

 

Article Views: 835

Sign in Area

Please sign in below

Additional Sign In options

Please note that to comment on an article you must be registered and logged in.
Registration is for free, you may already be registered to receive, e.g., the newsletter. When you register on this website, please ensure you view our terms and conditions. All comments are subject to moderation.

Article Comments - To add a comment please sign in

Bookmark and Share

If you would like to reuse any content, in print or online, from ChemistryViews.org, please contact us first for permission. more


CONNECT:

ChemistryViews.org on Facebook

ChemistryViews.org on Twitter ChemistryViews.org on YouTube ChemistryViews.org on LinkedIn Sign up for our free newsletter


Magazine of Chemistry Europe (16 European Chemical Societies)published by Wiley-VCH